Integrated Circuits (ICs)
(Microcircuits or Chips)
Integrated circuits are electronic circuits in micro-
miniature size, existing on a single piece of silicon, germanium, gallium
arsenide, or inert material (glass or ceramic) containing up to tens of
millions of transistors and other devices (diodes, resistors, capacitors).
These devices are formed in the semiconductor substrate, or as part of film
layers added to it. Twenty or more layers of circuitry may be involved and the
devices are all permanently interconnected. Circuit elements and devices on
each chip are extremely small and wiring paths are as narrow as 5 millionths of
an inch (0.13 microns), or less. (Process and design improvements are
continually being made. The Semiconductor Industry Association has projected
circuit dimensions of 0.05 microns, 50 nanometers, or 2 millionths of an inch
by 2012.)
12
ICs are produced in mass-production quantities
with extensive, highly sophisticated, extremely precise and extremely clean
manufacturing processes, often involving 600 or more steps before each chip is
completed. Chips vary in size but a common surface area is 0.24 sq. in (1.5 sq
cm).
Integrated circuits are the brains of computers and
other electronic devices including televisions, radios, stereo equipment,
cellular and regular phones, instruments, control devices, military navigation
equipment and firearms, aircraft, spacecraft, missiles, medical devices,
digital watches, automotive diagnostic devices, traffic control, environmental
monitoring, industrial process controls, video games and appliance controls.
The integrated circuit manufacturing process must deal
with circuit features that have the very smallest dimensions and are subject to
very subtle electrical and chemical effects. In order to prevent manufacturing
defects, the entire fabrication sequence must be free from contamination by
extraneous particles and chemicals. Clean room conditions, with the highest
order of freedom from extraneous particles, are maintained by use of fine
filters for ambient air and by limiting garments and room equipment to
lint-free types. Clothing must prevent the release of contaminants from
workers. Contamination from solvents and other chemicals, tools, equipment and
production supplies must also be carefully controlled throughout the process.
IC manufacture includes the following major stages:
material preparation, single crystal making, wafer preparation, wafer
fabrication (including the incorporation of circuitry), and packaging.